Steering Committee

 

Frank Altmann | Fraunhofer CAM | Germany

Frank Altmann is head of the research group »Diagnostics of semiconductor technologies« at Fraunhofer Insitute for Mechanics of Materials and its Center for Applied Microstructure Diagnostics (CAM). He looks back on 19 years of experience in focused ion beam applications and electron microscopy analysis, mainly in the field of microelectronics. During that time he has been involved in the development of advanced FIB preparation techniques, e.g. novel lift-out process utilizing clamp holder, residual thickness control of TEM lamellas and high throughput laser and plasma FIB based cross sectioning. Frank has been an active member of the Dreiländerarbeitskreis »FIB« committee for 7 years and has been working as co-organizer of the European FIB User Group meeting (EFUG) since 2014.

 

Dr. Guillaume Audoit | CEA Leti | France

Guillaume Audoit graduated from the French national school of chemistry in Montpellier in 2002 with a degree in material chemistry and get is PhD in material science from the University College Cork, Ireland in 2005. He has been working in the field of TEM/STEM analysis and related sample preparation by FIB and conventional method since 2006, starting in the industrial field for 4 years before taking a permanent research position at CEA Leti in 2010. He is currently the head of the sample preparation group at the nano-characterization center at CEA Leti in Grenoble, France. His experience includes FIB developments for preparing TEM and Atom Probe needle sample as well as PlasmaFIB developments for X-ray tomography sample preparation. He is a co-organizer of the European FIB User Group (EFUG) since 2016.

 

Dr. Petr Bábor | CEITEC, IPE Brno University of Technology | Czech Republic

Petr Bábor is working as a researcher in the Central European Institute of Technology and as a teacher at the Institute of Physical Engineering in Brno University of Technology. His main field of interest and research is materials science at micro- and nanoscale with the focus on analytical methods employing ion- and electron-solid interaction (SIMS, LEIS, FIB, AES, SEM), for instance, he pays attention to the SEM real-time observation of silicon and silica etching by liquefied metal silicide at elevated temperatures. Petr collaborates with the industry in the field of defect analysis of electronic devices, impurity and chemical analysis, design of new analytical devices etc. and is a member of the Czech Vacuum Society committee.

 

Dr. Marco Cantoni | EPFL | Switzerland

Marco Cantoni is working as facility manager in the interdisciplinary center for electron microscopy CIME at the Ecole polytechnique fédérale de Lausanne (EPFL). Its main expertise is in the field of material science (ceramics, ferroelectrics), as well as basic science (superconductors) and life sciences (FIB of resin embedded brain tissue). He developed sophisticated 3-dimensional analysis techniques, in particular based on focused-ion beam and gives training courses in high-resolution transmission electron microscopy, scanning transmission electron microscopy and analytical electron microscopy as well as FIB-Nanotomography.

 

Dr. Hans-Jürgen Engelmann | Helmholtz-Zentrum Dresden-Rossendorf e.V. | Germany

Hans-Jürgen Engelmann is now working as a researcher at the Helmholtz-Zentrum Dresden-Rossendorf e.V. in the Institute of Ion Beam Physics and Materials Research. He is the head of the DGM (Deutsche Gesellschaft für Materialkunde) working committee »FIB-Anwendungen in der Materialographie«. Now gathering more than 20 years of FIB experience mainly in the field of TEM sample and SEM X-section preparation, he was the initiator of the DGM FIB workshop that merged 12 years ago with the DACH workshop.

 

 

Dr. Harald Plank | Graz University of Technology | Austria

Harald Plank is department head for “Functional Nanofabrication” at the »Graz Centre of Electron Microscopy« and the »Institute for Electron Microscopy and Nanoanalysis« at the »Graz University of Technology« in Graz, Austria. His scientific focus is put on focused particle beam induced processing with particular emphasis on additive, direct-write 3D nano-printing using focused electron beam induced deposition (FEBID). Since 2018, he is head of the »Christian Doppler Laboratory for Direct-Write Fabrication of 3D Nano-Probes«, which aims at radically new concepts for multi-functional AFM probes in collaboration with industry.

 

Dr. Joakim Reuteler | ETH Zürich | Switzerland

Joakim Reuteler is working since 2011 as staff scientist at ETH Zürich’s microscopy platform: ScopeM (Scientific Center for Optical and Electron Microscopy). He is responsible for a conventional gallium FIBSEM and a Xenon Plasma-FIBSEM, an ion miller and coaters for sample preparation. After studying physics he graduated in materials science working on image analysis and the relation between microsctructure and materials properties. His expertise in electron microscopy spans from sample preparation to 3d image acquisition. He is regularly training new users, providing service and first level support for users of ScopeM.