Steering Committee


Frank Altmann | Fraunhofer CAM | Germany

Frank Altmann is head of the research group »Diagnostics of semiconductor technologies« at Fraunhofer Insitute for Mechanics of Materials and its Center for Applied Microstructure Diagnostics (CAM). He looks back on 19 years of experience in focused ion beam applications and electron microscopy analysis, mainly in the field of microelectronics. During that time he has been involved in the development of advanced FIB preparation techniques, e.g. novel lift-out process utilizing clamp holder, residual thickness control of TEM lamellas and high throughput laser and plasma FIB based cross sectioning. Frank has been an active member of the Dreiländerarbeitskreis »FIB« committee for 7 years and has been working as co-organizer of the European FIB User Group meeting (EFUG) since 2014.

Dr. Guillaume Audoit | CEA Leti | France

Guillaume Audoit graduated from the French national school of chemistry in Montpellier in 2002 with a degree in material chemistry and get is PhD in material science from the University College Cork, Ireland in 2005. He has been working in the field of TEM/STEM analysis and related sample preparation by FIB and conventional method since 2006, starting in the industrial field for 4 years before taking a permanent research position at CEA Leti in 2010. He is currently the head of the sample preparation group at the nano-characterization center at CEA Leti in Grenoble, France. His experience includes FIB developments for preparing TEM and Atom Probe needle sample as well as PlasmaFIB developments for X-ray tomography sample preparation. He is now a co-organizer of the European FIB User Group (EFUG).

Dr. Petr Bábor | CEITEC, IPE Brno University of Technology | Czech Republic

Petr Bábor is working as a researcher in the Central European Institute of Technology and as a teacher at the Institute of Physical Engineering in Brno University of Technology. His main field of interest and research is materials science at micro- and nanoscale with the focus on analytical methods employing ion- and electron-solid interaction (SIMS, LEIS, FIB, AES, SEM), for instance, he pays attention to the SEM real-time observation of silicon and silica etching by liquefied metal silicide at elevated temperatures. Petr collaborates with the industry in the field of defect analysis of electronic devices, impurity and chemical analysis, design of new analytical devices etc. and is a member of the Czech Vacuum Society committee.

Dr. Marco Cantoni | EPFL | Switzerland

Marco Cantoni is working as facility manager in the interdisciplinary center for electron microscopy CIME at the Ecole polytechnique fédérale de Lausanne (EPFL). Its main expertise is in the field of material science (ceramics, ferroelectrics), as well as basic science (superconductors) and life sciences (FIB of resin embedded brain tissue). He developed sophisticated 3-dimensional analysis techniques, in particular based on focused-ion beam and gives training courses in high-resolution transmission electron microscopy, scanning transmission electron microscopy and analytical electron microscopy as well as FIB-Nanotomography.

Dr. Hans-Jürgen Engelmann | Globalfoundries Inc. | Germany

Hans-Jürgen Engelmann is head of the Materials Analysis Lab at GLOBALFOUNDRIES Inc. Dresden and head of the DGM (Deutsche Gesellschaft für Materialkunde) working committee »FIB-Anwendungen in der Materialographie«. Now accumulating 17 years of FIB experience mainly in the field of TEM sample and SEM X-section preparation, he was the initiator of the DGM FIB workshop that merged 10 years ago with the DACH workshop.


Dr. Siegfried Menzel | IFW Dresden | Germany

Siegfried Menzel received his diploma in Electrical Engineering and Microelectronics and doctoral degree in Material Science at the Dresden University of Technology. From 1979-1989 he worked on plasma assisted thin film processes and the physics of the low temperature plasma. In 1990 he moved to the IFW Dresden, Germany, where he focused on laser material processing and solid state analysis. Now he is with the Department of Micro- and Nanostructures of the IFW Dresden. His scientific interests include advanced thin films and thin film analysis, SAW technology and transport phenomena in metallizations. He is the leader of the competence center for microacoustics, »SAWLab Saxony«.

Dr. Harald Plank | Graz University of Technology | Austria

Harald Plank is currently department head for FIB and AFM at the »Graz Centre of Electron Microscopy« and the »Institute for Electron Microscopy and Nanoanalysis« at the »Graz University of Technology« in Graz, Austria. His scientific focus is put on focused particle beam related nanofabrication with particular emphasis on FIB processing of low melting materials and focused electron beam induced processing (FEBIP). In more detail, the main interests are a fundamental understanding of these processes with respect to resolution limitations, shape performance, and material properties with the ultimate goal to transfer this knowledge into new application concepts for electric and optical sensors devices.

Dr. Joakim Reuteler | ETH Zürich | Switzerland

Since 2011 employed as senior researcher and technical staff for electron microscopy at ETH Zürich, Scientific Center for Optical and Electron Microscopy (ScopeM). Responsible for a conventional gallium FIB-SEM and a xenon Plasma-FIB-SEM. Main expertise in the field of material science and related fields like micro electronics, physics and chemistry as well as image analysis and processing. Regularly training new users, providing service and first level support for users of ScopeM.